FTIR spectroscopy and AES study of water containment in SiO2 thin films
Saved in:
Published in | Thin solid films Vol. 281-282; pp. 409 - 411 |
---|---|
Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.08.1996
|
Online Access | Get full text |
Cover
Loading…
ISSN: | 0040-6090 |
---|---|
DOI: | 10.1016/0040-6090(96)08690-7 |