Local atomic structure at thermally grown Si/SiO2 interfaces

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Bibliographic Details
Published in	Applied surface science Vol. 39; no. 1-4; pp. 103 - 115
Main Authors	Fitch, J.T., Bjorkman, C.H., Lucovsky, G., Pollak, F.H., Yin, X.
Format	Journal Article
Language	English
Published	01.10.1989
Online Access	Get full text

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