Local atomic structure at thermally grown Si/SiO2 interfaces

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Bibliographic Details
Published inApplied surface science Vol. 39; no. 1-4; pp. 103 - 115
Main Authors Fitch, J.T., Bjorkman, C.H., Lucovsky, G., Pollak, F.H., Yin, X.
Format Journal Article
LanguageEnglish
Published 01.10.1989
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ISSN:0169-4332
DOI:10.1016/0169-4332(89)90423-6