X-ray diffraction study of the effect of annealing temperature on the phase and structural states of Fe79Zr10N11 films produced by magnetron sputtering

Fe 79 Zr 10 N 11 films 0.7 μm thick deposited on glass substrates have been produced by rf reactive magnetron sputtering. The films are a soft magnetic material, which can exhibit a combination of a high saturation inductance and a low coercive force and, therefore, shows promise as magnetic recordi...

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Bibliographic Details
Published inPhysics of metals and metallography Vol. 105; no. 5; pp. 471 - 476
Main Authors Sheftel’, E. N., Utitskikh, S. I., Ivanov, A. N., Inoue, M., Fujikawa, R.
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.05.2008
Springer Nature B.V
Subjects
Chemistry and Materials Science
Diffusion
Glass substrates
Information storage
Magnetic tape
Materials Science
Metallic Materials
Phase Transformations
Structure
68.55.Jk
81.15.Cd
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Summary:Fe 79 Zr 10 N 11 films 0.7 μm thick deposited on glass substrates have been produced by rf reactive magnetron sputtering. The films are a soft magnetic material, which can exhibit a combination of a high saturation inductance and a low coercive force and, therefore, shows promise as magnetic recording cores for the high-density magnetic recording. The results of X-ray diffraction studies of the phase and structural states of the films and the effect of annealing on these states are considered.
ISSN:0031-918X
1555-6190
DOI:10.1134/S0031918X08050074