An Ion-Sputtering Gun to Clean Crystal Surfaces In-Situ in an Ultra-High-Vacuum Electron Microscope

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 19; no. 10; pp. 1981 - 1994
Main Authors Morita, Etsuo, Takayanagi, Kunio, Kobayashi, Kunio, Yagi, Katsumichi, Honjo, Goro
Format Journal Article
LanguageEnglish
Published 1980
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.19.1981