Design and experimental research on a visible-near infrared spatial modulating Fourier transform spectrometer based on micro multi-step mirrors

A type of spatial modulating micro Fourier transform spectrometer (FTS) based on micro multi-step mirrors (MMSMs) is designed and manufactured in this paper. The interference system is based on Michelson interferometer, using two MMSMs instead of plane mirrors in two arms. The recovered spectrum is...

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Published inOptoelectronics letters Vol. 10; no. 3; pp. 172 - 175
Main Author 秦余欣 梁静秋 梁中翥 田超 吕金光 王维彪
Format Journal Article
LanguageEnglish
Published Heidelberg Tianjin University of Technology 01.05.2014
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ISSN1673-1905
1993-5013
DOI10.1007/s11801-014-3178-8

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Summary:A type of spatial modulating micro Fourier transform spectrometer (FTS) based on micro multi-step mirrors (MMSMs) is designed and manufactured in this paper. The interference system is based on Michelson interferometer, using two MMSMs instead of plane mirrors in two arms. The recovered spectrum is simulated with different distances between MMSMs and the detector, and the influence of diffraction on the recovered spectrum is analyzed. The edge-enlarging method for the MMSMs is proposed to eliminate edge noise, and the influence of surface roughness of MMSMs on the recovered spectrum is also analyzed. Moreover, the way of manufacturing the MMSMs is investigated.
Bibliography:12-1370/TN
QIN Yu-xin , LIANG Jing-qiu , LIANG Zhong-zhu , TIAN Chao , LU Jin-guang , and WANG Wei-biao State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Acad- emy of Sciences, Changchun 130033, China
A type of spatial modulating micro Fourier transform spectrometer (FTS) based on micro multi-step mirrors (MMSMs) is designed and manufactured in this paper. The interference system is based on Michelson interferometer, using two MMSMs instead of plane mirrors in two arms. The recovered spectrum is simulated with different distances between MMSMs and the detector, and the influence of diffraction on the recovered spectrum is analyzed. The edge-enlarging method for the MMSMs is proposed to eliminate edge noise, and the influence of surface roughness of MMSMs on the recovered spectrum is also analyzed. Moreover, the way of manufacturing the MMSMs is investigated.
ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-014-3178-8