One-Dimensional Modeling Studies of the Gaseous Electronics Conference RF Reference Cell

A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed...

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Bibliographic Details
Published inJournal of research of the National Institute of Standards and Technology Vol. 100; no. 4; pp. 463 - 472
Main Authors Govindan, T R, Meyyappan, M
Format Journal Article
LanguageEnglish
Published United States [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 01.07.1995
Subjects
fluid model
plasma processing
hybrid model
one-dimensional
rf discharge
reference cell
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Summary:A review of the one-dimensional modeling studies in the literature of the Gaseous Electronics Conference (GEC) reference plasma reactor is presented. Most of the studies are based on the fluid model description of the discharge and some utilize hybrid fluid-kinetic schemes. Both models are discussed here briefly. The models provide a basic understanding of the discharge mechanisms and reproduce several critical discharge features observed experimentally.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
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ISSN:1044-677X
2165-7254
DOI:10.6028/jres.100.035