An integrated MEMS piezoresistive tri-axis accelerometer

An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The...

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Published inJournal of semiconductors Vol. 34; no. 10; pp. 76 - 82
Main Author 张永平 何常德 于佳琪 杜春晖 张娟婷 丑修建 张文栋
Format Journal Article
LanguageEnglish
Published 01.10.2013
Subjects
Accelerometers
Devices
MEMS
Navigation
Nonlinearity
Orientation
Performance indices
Piezoresistors
Semiconductors
三轴
加速度计
压阻效应
惠斯通电桥
矢量检测
耦合因子
高度集成
Online AccessGet full text
ISSN1674-4926
DOI10.1088/1674-4926/34/10/104009

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Summary:An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, crossaxis-coupling degree, and linearity are presented. The sensitivity of X, Y and Z were 5.49 mV/g, 5.12 mV/g and 4.82 mV/g, respectively; the nonlinearity of X, Y and Z were 0.01%, 0.04% and 0.01%, respectively; the crossaxis-coupling factor of X axis to Y axis and Z axis are 0.119% and 2.26%; the cross-axis-coupling factor of Y axis to X axis and Z axis are 0.157% and 4.12%; the cross-axis-coupling factor of Z axis to X axis and Y axis are 0.511% and 0.938%. The measured performance indexes attain accurate vector-detection in practical applications, and even at a navigation level. In conclusion, the accelerometer is a highly integrated sensor.
Bibliography:Zhang Yongping, He Changde, Yu Jiaqi, Du Chunhui, Zhang Juanting, Chou Xiujian,Zhang Wendong（ 1.Key Laboratory of Instrumentation Science ＆ Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China 2.Key Laboratory of Science and Technology on Electronic Test ＆ Measurement, North University of China, Taiyuan 030051, China）
11-5781/TN
An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, crossaxis-coupling degree, and linearity are presented. The sensitivity of X, Y and Z were 5.49 mV/g, 5.12 mV/g and 4.82 mV/g, respectively; the nonlinearity of X, Y and Z were 0.01%, 0.04% and 0.01%, respectively; the crossaxis-coupling factor of X axis to Y axis and Z axis are 0.119% and 2.26%; the cross-axis-coupling factor of Y axis to X axis and Z axis are 0.157% and 4.12%; the cross-axis-coupling factor of Z axis to X axis and Y axis are 0.511% and 0.938%. The measured performance indexes attain accurate vector-detection in practical applications, and even at a navigation level. In conclusion, the accelerometer is a highly integrated sensor.
accelerometer; integration; piezoresistive; tri-axis; MEMS
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ISSN:1674-4926
DOI:10.1088/1674-4926/34/10/104009