Determination of organic impurities by plasma electron spectroscopy in nonlocal plasma at intermediate and high pressures

• Published in: Plasma sources science & technology Vol. 31; no. 10; pp. 107001 - 107007
• Main Authors: Zhou, Chen, Yao, Jingfeng, Saifutdinov, Almaz I, Kudryavtsev, Anatoly A, Yuan, Chengxun, Ma, Guowei, Dou, Zhiyu, Cao, Jingjie, Ma, Mingxi, Zhou, Zhongxiang
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.10.2022
• Subjects: electron distribution function; gas impurities detection; glow discharge; nonlocal plasma; plasma electron spectroscopy; probe diagnostic
• ISSN: 0963-0252; 1361-6595
• DOI: 10.1088/1361-6595/ac91a1

This study aims to improve impurity analysis by plasma electron spectroscopy for organic molecules. Various impurities can be registered simultaneously in one measurement, because the appearance energies of the characteristic Penning electrons vary for different chemical compounds. Herein, experimental studies were conducted on helium with alcohol vapor impurities in a nonlocal negative glow plasma of a short glow micro-discharge with an increase in pressure from 15 Torr to 150 Torr. As a result, plasma electron spectroscopy enables the detection of gas impurities in high-pressure (even at atmospheric) environments, which eliminates the need for expensive and cumbersome gas pumping systems and expands the scope of the method.