Fabrication of high aspect ratio gratings for X-ray imaging

Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies w...

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Bibliographic Details
Published inOptoelectronics letters Vol. 10; no. 2; pp. 88 - 90
Main Author 侯双月 熊瑛 陈珊 熊鹏辉 陈翔宇 张晓波 田扬超 刘刚
Format Journal Article
LanguageEnglish
Published Heidelberg Tianjin University of Technology 01.03.2014
Subjects
Lasers
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
SU-8
X射线成像系统
光栅
内部结构
制造
曝光剂量
照射剂量
纵横比
Exposure Dose
Post Exposure Bake
Duty Cycle
Physica Status Solidus
Standard Lithography
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Summary:Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating.
Bibliography:12-1370/TN
HOU Shuang-yue, XIONG Ying, CHEN Shan, XIONG Peng-hui, CHEN Xiang-yu , ZHANG Xiao-bo, TIAN Yang-chao,LlU Gang（1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China 2. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China）
Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating.
ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-014-3220-x