Microstructure and lateral conductivity control of hydrogenated nanocrystalline silicon oxide and its application in a-Si：H/a-SiGe：H tandem solar cells

Phosphorous-doped hydrogenated nanocrystalline silicon oxide （n-nc-SiOx：H） films are prepared via radio frequency plasma enhanced chemical vapor deposition （RF-PECVD）. Increasing deposition power during n-nc-SiOx：H film growth process can enhance the formation of nanocrystalline and obtain a uniform...

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Published inChinese physics B Vol. 25; no. 4; pp. 243 - 248
Main Author 郑志远 张思齐 梁田 高禄 高华 张自力 李天天 杨铁 方家 张德坤 孙建 魏长春 许盛之 王广才 刘彩池 赵颖 张晓丹
Format Journal Article
LanguageEnglish
Published 01.04.2016
Subjects
Deposition
Microstructure
Nanocrystals
Photovoltaic cells
Reflectors
Silicon dioxide
Solar cells
Solar power generation
串联
太阳能电池
射频等离子体增强化学气相沉积
控制结构
电导率
电沉积过程
纳米氧化硅
非晶硅薄膜
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Summary:Phosphorous-doped hydrogenated nanocrystalline silicon oxide （n-nc-SiOx：H） films are prepared via radio frequency plasma enhanced chemical vapor deposition （RF-PECVD）. Increasing deposition power during n-nc-SiOx：H film growth process can enhance the formation of nanocrystalline and obtain a uniform microstructure of n-nc-SiOx：H film. In addition, in 20s interval before increasing the deposition power, high density small grains are formed in amorphous SiOx matrix with higher crystalline volume fraction （Ic） and have a lower lateral conductivity. This uniform microstructure indicates that the higher Ic can leads to better vertical conductivity, lower refractive index, wider optical band-gap. It improves the back reflection in a-Si：H/a-SiGe：H tandem solar cells acting as an n-nc-SiOx：H back reflector prepared by the gradient power during deposition. Compared with the sample with SiOx back reflector, with a constant power used in deposition process, the sample with gradient power SiOx back reflector can enhance the total short-circuit current density （Jsc） and the initial efficiency of a-Si：H/a-SiGe：H tandem solar cells by 8.3% and 15.5%, respectively.
Bibliography:gradient deposition power, n-nc-SiOx：H films, back reflector, Tandem solar cells
Phosphorous-doped hydrogenated nanocrystalline silicon oxide （n-nc-SiOx：H） films are prepared via radio frequency plasma enhanced chemical vapor deposition （RF-PECVD）. Increasing deposition power during n-nc-SiOx：H film growth process can enhance the formation of nanocrystalline and obtain a uniform microstructure of n-nc-SiOx：H film. In addition, in 20s interval before increasing the deposition power, high density small grains are formed in amorphous SiOx matrix with higher crystalline volume fraction （Ic） and have a lower lateral conductivity. This uniform microstructure indicates that the higher Ic can leads to better vertical conductivity, lower refractive index, wider optical band-gap. It improves the back reflection in a-Si：H/a-SiGe：H tandem solar cells acting as an n-nc-SiOx：H back reflector prepared by the gradient power during deposition. Compared with the sample with SiOx back reflector, with a constant power used in deposition process, the sample with gradient power SiOx back reflector can enhance the total short-circuit current density （Jsc） and the initial efficiency of a-Si：H/a-SiGe：H tandem solar cells by 8.3% and 15.5%, respectively.
11-5639/O4
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/25/4/046101