Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers were used as the basis of the reflective multila...

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Bibliographic Details
Published inCoatings (Basel) Vol. 12; no. 2; p. 290
Main Authors Telekh, Victor D., Pavlov, Aleksei V., Kirillov, Daniil V., Vorob’ev, Evgeny V., Turyanskiy, Alexander G., Senkov, Viacheslav M., Tsygankov, Petr A., Parada-Becerra, Freddy F., Vesnin, Vladimir R., Skriabin, Andrei S.
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 01.02.2022
Subjects
Bilayers
Brightness
Broadband
Degradation
Dynamic response
Gases
Glass substrates
Infrared spectroscopy
Irradiation
Lasers
Morphology
Multilayers
Neon
Optical properties
Schlieren photography
Soil erosion
Spectrum analysis
Ultraviolet radiation
United States > US
Russia
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Summary:This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers were used as the basis of the reflective multilayers for the visible and UV ranges. A gas-dynamic response from the irradiated surfaces was studied with schlieren photography. The properties of original and irradiated multilayers were described with ultra violet visible infrared spectroscopy (UV-Vis-IR), X-ray diffraction (XRD), X-ray reflectometry, scanning electron microscopy (SEM) and other techniques. Data on the degradation of optical properties and surface morphology were obtained.
ISSN:2079-6412
2079-6412
DOI:10.3390/coatings12020290