The Determination of the Effective Radius of the Tip of the Probe of an Atomic Force Microscope Using Monodispersed Silicon Oxide Nanoparticles

• Published in: Measurement techniques Vol. 56; no. 12; pp. 1343 - 1346
• Main Authors: Efimov, A. A., Ivanov, V. V., Volkov, I. A., Lizunova, A. A., Lisovskii, S. V., Ermakova, M. A.
• Format: Journal Article
• Language: English
• Published: Boston Springer US 01.03.2014; Springer
• Subjects: Analytical Chemistry; Characterization and Evaluation of Materials; Measurement Science and Instrumentation; Nanoparticles; Physical Chemistry; Physics; Physics and Astronomy; Rain and rainfall; Silicon; radius of the probe tip; electrostatic precipitation of aerosol particles; atomic-force microscope; monodispersed ensemble of nanoparticles
• ISSN: 0543-1972; 1573-8906
• DOI: 10.1007/s11018-014-0379-2

A method of constructing samples of a monodispersed ensemble of spherical particles of silicon oxide with a diameter of 26.6 ± 3.5 nm, distributed uniformly on the surface of a single-crystal silicon substrate of area 1 cm 2 with a mean particle surface density of about 0.5 particles/μm 2 is developed. The use of the test structure obtained to determine the effective radius of the tip of the probe of a scanning atomic-force microscope is demonstrated.