Stability of Silicon Microelectromechanical Systems Resonant Thermometers

The frequency stability of single-crystal silicon microelectromechanical systems resonators encapsulated with epitaxial polysilicon (epi-seal) is investigated. As silicon resonators have significant temperature dependence, the inherent frequency stability of the resonators is masked by temperature-i...

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Bibliographic Details
Published inIEEE sensors journal Vol. 13; no. 3; pp. 987 - 993
Main Authors Ng, E. J., Hyung Kyu Lee, Chae Hyuck Ahn, Melamud, R., Kenny, T. W.
Format Journal Article
LanguageEnglish
Published IEEE 01.03.2013
Subjects
Circuit stability
Frequency measurement
Micromechanical resonators
Resonant frequency
Silicon
stability
Temperature measurement
Temperature sensors
Thermal stability
thermometer
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Summary:The frequency stability of single-crystal silicon microelectromechanical systems resonators encapsulated with epitaxial polysilicon (epi-seal) is investigated. As silicon resonators have significant temperature dependence, the inherent frequency stability of the resonators is masked by temperature-induced noise. Using two resonators side-by-side and assuming identical temperatures and fluctuations, temperature effects are eliminated, resulting in the two resonators tracking each other within ±10 ppb, or 3 × 10 -4 °C, over a month. Power and thermal cycling the resonators produced no observable effects on the resonant frequency. This result indicates that silicon resonators make excellent on-chip thermometers, or high stability timing references if temperature is compensated well.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2012.2227708