Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogen...
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| Published in | Review of scientific instruments Vol. 84; no. 10; p. 103303 |
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| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
United States
01.10.2013
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| Online Access | Get more information |
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| Abstract | A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogeneous surface processes are monitored in situ by means of a quartz crystal microbalance and Fourier transform infrared spectroscopy. Two examples illustrate the capabilities of the particle beam setup: oxidation and nitriding of aluminum as a model of target poisoning during reactive magnetron sputtering, and plasma pre-treatment of polymers (PET, PP). |
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| AbstractList | A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogeneous surface processes are monitored in situ by means of a quartz crystal microbalance and Fourier transform infrared spectroscopy. Two examples illustrate the capabilities of the particle beam setup: oxidation and nitriding of aluminum as a model of target poisoning during reactive magnetron sputtering, and plasma pre-treatment of polymers (PET, PP). |
| Author | de los Arcos, Teresa Benedikt, Jan Grosse-Kreul, Simon Kreiter, Oliver von Keudell, Achim Corbella, Carles |
| Author_xml | – sequence: 1 givenname: Carles surname: Corbella fullname: Corbella, Carles organization: RD Plasmas with Complex Interactions, Ruhr-Universität Bochum, Universitätsstr. 150, 44780 Bochum, Germany – sequence: 2 givenname: Simon surname: Grosse-Kreul fullname: Grosse-Kreul, Simon – sequence: 3 givenname: Oliver surname: Kreiter fullname: Kreiter, Oliver – sequence: 4 givenname: Teresa surname: de los Arcos fullname: de los Arcos, Teresa – sequence: 5 givenname: Jan surname: Benedikt fullname: Benedikt, Jan – sequence: 6 givenname: Achim surname: von Keudell fullname: von Keudell, Achim |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/24182103$$D View this record in MEDLINE/PubMed |
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| CitedBy_id | crossref_primary_10_1063_5_0166926 crossref_primary_10_1016_j_apsusc_2017_09_208 crossref_primary_10_1063_1_4977820 crossref_primary_10_1063_1_4978348 crossref_primary_10_1016_j_apsusc_2017_05_258 crossref_primary_10_1063_1_4932150 crossref_primary_10_1002_ppap_201400188 crossref_primary_10_1088_0022_3727_49_16_16LT01 crossref_primary_10_1007_s10894_023_00380_w crossref_primary_10_1116_1_4972566 crossref_primary_10_1063_5_0011283 crossref_primary_10_1002_ppap_201900019 crossref_primary_10_1002_ppap_201700230 crossref_primary_10_3390_nano13152235 crossref_primary_10_1039_C7CP05373H crossref_primary_10_1116_1_4983275 crossref_primary_10_1007_s12274_017_1532_4 crossref_primary_10_1063_1_4932309 |
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