Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogen...

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Bibliographic Details
Published inReview of scientific instruments Vol. 84; no. 10; p. 103303
Main Authors Corbella, Carles, Grosse-Kreul, Simon, Kreiter, Oliver, de los Arcos, Teresa, Benedikt, Jan, von Keudell, Achim
Format Journal Article
LanguageEnglish
Published United States 01.10.2013
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Summary:A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions in reactive sputtering applications. Atom and ion sources are focused onto the sample to expose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions, and metal vapor. The heterogeneous surface processes are monitored in situ by means of a quartz crystal microbalance and Fourier transform infrared spectroscopy. Two examples illustrate the capabilities of the particle beam setup: oxidation and nitriding of aluminum as a model of target poisoning during reactive magnetron sputtering, and plasma pre-treatment of polymers (PET, PP).
ISSN:1089-7623
DOI:10.1063/1.4826066