Triaxial Quartz Gyrosensor Using a Threefold Rotatory Symmetric Form Vibrator

• Published in: Japanese Journal of Applied Physics Vol. 44; no. 6S; p. 4504
• Main Authors: Tamura, Hideki, Takano, Takehiro, Tomikawa, Yoshiro
• Format: Journal Article
• Language: English
• Published: 01.06.2005
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/JJAP.44.4504

In this paper, we deal with the operation principle and structures for a monolithic quartz gyrosensor which can detect three-axis angular velocities. In order to detect three-dimensional angular velocities, the sensor device needs two or more directional vibrating components. However, a majority of tuning-fork-type resonators have vibrational velocities of only one direction. Here, we propose a new vibrator structure, which is formed with threefold rotational symmetry, the same as the crystal symmetry of a quartz crystal. This vibrator has three symmetrically placed driving beams. These driving beams can be vibrated symmetrically by a single driving mode, and the initial vibrational velocities are excited in three individual directions. We analyze this vibrator using the finite element method. The analysis results prove that the new proposed structure can be excited and detect the necessary vibration modes by the piezoelectric method, and show that the three-dimensional angular velocities are detected and separated. Finally, the operating simulation shows that the triaxial quartz gyrosensor can be realized.