Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricate...

Full description

Saved in:
Bibliographic Details
Published inChinese physics B Vol. 25; no. 3; pp. 453 - 457
Main Author 吕倩倩 潘盼 叶焓 尹冬冬 王玉冰 杨晓红 韩勤
Format Journal Article
LanguageEnglish
Published 01.03.2016
Subjects
Arrays
Diffraction gratings
Insertion
Joining
Matching
Photodiodes
Simulation
Waveguides
光学模拟
光电二极管阵列
制作
多通道
探测器阵列
经设计
耦合波导
阵列波导光栅
Online AccessGet full text
ISSN1674-1056
2058-3834
1741-4199
DOI10.1088/1674-1056/25/3/038505

Cover

More Information
Summary:We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.
Bibliography:11-5639/O4
photodetector array, monolithic, evanescent coupling, arrayed waveguide grating
We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/25/3/038505