Phase Processing Method of Interferometry Measurement for Form Deviation of the Surface of Machine Parts

Interference fringe pattern of a laser beam reflected from the surface to be measured is constructed directly on the CCD image sensor, but the density of fringes is high in the region near the sides of the image figure. This makes image processing, especially the phase concatenating procedure, diffi...

Full description

Saved in:
Bibliographic Details
Published inTransactions of the Japan Society of Mechanical Engineers Series C Vol. 61; no. 581; pp. 106 - 114
Main Authors Fang, Suping, Kubo, Aizoh, Fujio, Hiroshige, Oyama, Kazufumi, Saitoh, Yoshiaki, Suzuki, Mitsuo
Format Journal Article
LanguageJapanese
Published The Japan Society of Mechanical Engineers 1995
Subjects
Accuracy Measurement
Form Deviation
Laser Interferometry
Phase Difference
Phase Stepping Method
Online AccessGet full text

Cover

More Information
Summary:Interference fringe pattern of a laser beam reflected from the surface to be measured is constructed directly on the CCD image sensor, but the density of fringes is high in the region near the sides of the image figure. This makes image processing, especially the phase concatenating procedure, difficult and noise occurs easily as a result. When phase concatenation is carried out for reference surface and for the surface to be measured independently, further image processing becomes impossible. In this report, a new method for processing the brightness of interference fringes is shown. Using planar test pieces with simple form deviation, significant improvement in the results of the proposed data processing method is shown.
ISSN:0387-5024
1884-8354
DOI:10.1299/kikaic.61.106