A finite element analysis of thermoelastic damping in vented MEMS beam resonators

• Published in: International journal of mechanical sciences Vol. 74; pp. 73 - 82
• Main Authors: Guo, X., Yi, Y.-B., Pourkamali, S.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.09.2013
• Subjects: Eigenvalue method; Finite element method; MEMS beam resonator; Thermoleastic damping; Vents; Finite element method; MEMS beam resonator; Vents; Thermoleastic damping; Eigenvalue method
• ISSN: 0020-7403; 1879-2162
• DOI: 10.1016/j.ijmecsci.2013.04.013

The effect of geometry on thermoelastic damping in micro-beam resonators is evaluated using an eigenvalue formulation and a customized finite element method. The vented clamped–clamped (CC) and clamped-free (CF) beams with square-shaped vents along their centerlines, are both analyzed by the finite element method. The quality factor and the resonant frequency are obtained as functions of various geometrical parameters including the location, number and size of the vents. The numerical results reveal that the addition of vent sections in the clamped end region can significantly increase the quality factor. The maximum improved quality factor as high as 3801 and 2257 times those of the CC and CF solid beams are realized. The methodology presented in this work provides a useful tool in design optimization of micro beam resonators against thermoelastic damping. •Thermoelastic damping in resonators is studied using the finite element method.•The vent width plays a more important role than the vent length.•Vents at the clamped end can raise the quality factor significantly.•Vents reduce the structural rigidity and thus reduce the resonant frequency.