Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering
Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated t...
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Published in | Journal of applied physics Vol. 99; no. 8; pp. 08M301 - 08M301-3 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
United States
American Institute of Physics
15.04.2006
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Subjects | |
Online Access | Get full text |
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Summary: | Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated the substrate dependence of its soft magnetic property. Atomic force microscopy and grazing incidence x-ray-scattering-diffraction spectra show that a rough substrate surface degrades the magnetic property of CoFeHfO thin films with almost the same crystal microstructure. With surface planarization by chemical-mechanical polishing, soft magnetic material CoFeHfO can be realized on the package substrate. This material is promising for future applications in package. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.2158973 |