Heating of large-area substrates for in situ deposition of YBCO

We have developed a radiant technique for substrate heating which we found particularly useful for the in situ deposition of high temperature superconducting films. Using this technique, large area YBa/sub 2/Cu/sub 3/O/sub x/ films were deposited, using off-axis sputter deposition, onto lanthanum al...

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Bibliographic Details
Published inIEEE transactions on applied superconductivity Vol. 5; no. 2; pp. 1793 - 1796
Main Authors Drehman, A.J., Derov, J.S., Horrigan, J.A., Andrews, R.J., Linden, D.S.
Format Journal Article
LanguageEnglish
Published IEEE 01.06.1995
Subjects
Buffer layers
Dielectric substrates
Electromagnetic heating
High temperature superconductors
Lanthanum
Sputtering
Superconducting epitaxial layers
Superconducting films
Superconducting microwave devices
Yttrium barium copper oxide
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Summary:We have developed a radiant technique for substrate heating which we found particularly useful for the in situ deposition of high temperature superconducting films. Using this technique, large area YBa/sub 2/Cu/sub 3/O/sub x/ films were deposited, using off-axis sputter deposition, onto lanthanum aluminate and sapphire substrates, the latter using an yttria-stabilized zirconia buffer layer. For both types of substrates we were able to obtain c-axis oriented films. The DC and microwave properties of the films deposited on lanthanum aluminate are presented along with the DC measurements of the films deposited on sapphire. The motivation for employing this method of heating are discussed, along with our current plans for scaling up the process to produce even larger area films.< >
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1051-8223
1558-2515
DOI:10.1109/77.402927