Influence of inlet structures of planetary reactor on gas reaction path in AlN-MOVPE process

•Gas reaction path in planetary reactor for AlN-MOVPE was numerically studied.•For the conventional two-inlet reactor, the reaction is dominated by the adduct path.•For the inverted two-inlet reactor, the reaction is dominated by the pyrolysis path.•With the reactor inlets increasing, both growth ra...

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Bibliographic Details
Published inJournal of crystal growth Vol. 554; p. 125942
Main Authors Mao, Yanlin, Zuo, Ran, Fang, Yulong, Yin, Jiayun, Guo, Yanmin, Feng, Zhihong
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.01.2021
Subjects
AlN
Gas reactions
MOVPE
Numerical simulation
Planetary reactor
Numerical simulation
AlN
Gas reactions
MOVPE
Planetary reactor
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Summary:•Gas reaction path in planetary reactor for AlN-MOVPE was numerically studied.•For the conventional two-inlet reactor, the reaction is dominated by the adduct path.•For the inverted two-inlet reactor, the reaction is dominated by the pyrolysis path.•With the reactor inlets increasing, both growth rate and growth uniformity increase.•When the reactor inlets increase to 5, the adduct and pyrolysis paths coexist. Numerical study on the influence of inlet structure of planetary reactor on gas reaction path and growth rate in AlN-MOVPE was investigated. It was found that, for the conventional two-inlet reactor (base reactor), the reaction is dominated by the adduct reaction path, and the growth rate is low but evenly distributed; for the inverted inlet reactor, i.e., group-III in lower inlet and group-V in upper inlet, the reaction is dominated by the pyrolysis path, and the growth rate is higher than the base reactor but the growth uniformity is decreased. By moving the position of the inlet separator closer to the ceiling for the inverted inlet, the growth uniformity is improved. When the number of reactor inlets increases from two inlets (base reactor) to three and five inlets, the growth rate increases, the growth uniformity improves, and the reaction changes from the adduct-dominated path to the pyrolysis and adduct coexisted path. Besides varying the inlet geometry, we also found that decreasing the NH3 flow rate will enhance the pyrolysis path and the growth rate for the above reactors.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2020.125942