Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber

• Published in: Plasma science & technology Vol. 24; no. 1; pp. 15403 - 15409
• Main Authors: LOJEN, Dane, ZAPLOTNIK, Rok, MOZETIČ, Miran, VESEL, Alenka, PRIMC, Gregor
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.01.2022
• Subjects: E- to H-mode transition; high power; inductively coupled plasma; large-area plasma
• ISSN: 1009-0630; 2058-6272
• DOI: 10.1088/2058-6272/ac363f

Abstract The characteristics of an innovative configuration of multiple radiofrequency (RF) coils immersed in a large metallic chamber are presented. Water-cooled copper coils were mounted within the slits of double-walled glass tubes, which were immersed into a stainless-steel chamber. The coils were connected in parallel to a gamma-type matching network, powered by an RF generator operating at industrial frequency. Adjustable leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four coils. Transitions from E- to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa. A uniform plasma was sustained in H-mode at the absorbed power threshold, which increased monotonously with increasing pressure in the metallic chamber. All coils exhibit the same E- to H-mode transition hysteresis and need the same amount of power for transitioning from E- to H-mode. The setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.