Divided-aperture differential confocal fast-imaging microscopy

A new method, laser divided-aperture differential confocal microscopy (DDCM), is proposed to achieve high-resolution 3D imaging of microstructures of large-scale sample surfaces. This method uses a divided-aperture confocal structure to significantly improve the axial resolution of confocal microsco...

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Bibliographic Details
Published inMeasurement science & technology Vol. 28; no. 3; pp. 35401 - 35409
Main Authors Wang, Yun, Qiu, Lirong, Zhao, Xiangye, Zhao, Weiqian
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.03.2017
Subjects
confocal
differential
imaging
surface measurements
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Summary:A new method, laser divided-aperture differential confocal microscopy (DDCM), is proposed to achieve high-resolution 3D imaging of microstructures of large-scale sample surfaces. This method uses a divided-aperture confocal structure to significantly improve the axial resolution of confocal microscopy and keep a long working distance simultaneously; uses two radically offset point detectors to achieve differential detection to further improve the axial response sensitivity and realize fast imaging of a large-scale sample surface with a big axial scan-step interval. Theoretical analyses and experimental results show that the DDCM can reach an axial resolution of 5 nm with a 3.1 mm working distance with a 3 times imaging speed of a confocal system with the same resolution.
Bibliography:MST-104667.R1
ISSN:0957-0233
1361-6501
DOI:10.1088/1361-6501/aa552f