Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

• Published in: Chinese physics B Vol. 23; no. 4; pp. 351 - 357
• Main Author: 吴少华 杜利东 孔德义 平皓月 方震 赵湛
• Format: Journal Article
• Language: English
• Published: 01.04.2014
• Subjects: Acoustic noise; Devices; Energy harvesting; Membranes; Panels; Reduction; Silicon; Vibration; 吸收系数; 微穿孔板; 混合动力装置; 混合装置; 硅; 结构声; 能量收集; 降噪结构
• ISSN: 1674-1056; 2058-3834; 1741-4199
• DOI: 10.1088/1674-1056/23/4/044302

A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro- perforated panel （MPP） resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems （MEMS） tech- nology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezo- electric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.