Lubrication of advanced metal evaporated tape using novel perfluoropolyether lubricants

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 12; no. 6; pp. 579 - 587
• Main Authors: BHUSHAN, Bharat, ZHENHUA TAO
• Format: Journal Article
• Language: English
• Published: Berlin Springer 01.05.2006
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Fracture mechanics (crack, fatigue, damage...); Fundamental areas of phenomenology (including applications); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Solid mechanics; Structural and continuum mechanics; Pin on disk machine; Organic perhalocompound; Tape; Fluorine containing polymer; Tribochemical reaction; Rupture; Durability; Ether polymer; Experimental study; Coatings; Dry friction; Lubricant; Ethylene oxide polymer; Vacuum; Magnetic tape; Lubrication; Mass spectrometer; Mass spectrometry; Pin disk test; Tribology
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-006-0113-3