Calibrating the Z-magnification of atomic force microscope below 10 nm by single-atom steps

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Bibliographic Details
Published inThin solid films Vol. 584; pp. 372 - 377
Main Authors He, Bo-Ching, Fu, Wei-En, Wu, Chung-Lin, Chien, Yun-San, Liou, Huay-Chung
Format Journal Article
LanguageEnglish
Published 01.06.2015
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ISSN:0040-6090
DOI:10.1016/j.tsf.2015.01.019