Design and Fabrication of Suspended Indium Phosphide Waveguides for MEMS-Actuated Optical Buffering

We present the design and fabrication of suspended optical waveguides on indium phosphide platform for use in an optical buffer device with MEMS actuation, in which the optical delay can be achieved by changing the spacing of the waveguides by electrostatic actuation. The optical and mechanical prop...

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Bibliographic Details
Published inIEEE journal of selected topics in quantum electronics Vol. 21; no. 4; pp. 240 - 246
Main Authors Ng, Wing H., Podoliak, Nina, Horak, Peter, Jiang Wu, Huiyun Liu, Stewart, William J., Kenyon, Anthony J.
Format Journal Article
LanguageEnglish
Published IEEE 01.07.2015
Subjects
III-V semiconductor materials
Indium phosphide
microelectromechanical systems
Optical buffering
Optical device fabrication
Optical resonators
Optical surface waves
Optical waveguides
Waveguide discontinuities
optical buffering
indium phosphide
optical waveguides
microelectromechanical systems
III-V semiconductor materials
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Summary:We present the design and fabrication of suspended optical waveguides on indium phosphide platform for use in an optical buffer device with MEMS actuation, in which the optical delay can be achieved by changing the spacing of the waveguides by electrostatic actuation. The optical and mechanical properties of the waveguides and pillar supports are modeled, and different MEMS actuation schemes are simulated. We also present fabrication and characterization results of the epitaxially grown sample structure and of the suspended waveguide device, exhibiting two parallel waveguides with submicron dimensions separated by a 400-nm air gap, and suspended at 40-μm intervals by S-shaped supports.
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2014.2384514