Detailed analysis of electrical components on a layered wafer via the AC pseudo-MOS method

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Bibliographic Details
Published inSolid-state electronics Vol. 210; p. 108811
Main Authors Yuan, Yifan, Sato, Shingo
Format Journal Article
LanguageEnglish
Published 01.12.2023
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ISSN:0038-1101
DOI:10.1016/j.sse.2023.108811