Optical studies in distributed Bragg reflectors built from ZnO/MgO multilayer films

We present the distributed Bragg reflectors (DBRs) with 10- and 15-period zinc oxide (ZnO)/MgO multilayer films deposited on silicon by sputtering technology. The reflectivity for the 10-period ZnO/MgO stacks can reach to 91.4% and for the 15-period ZnO/MgO stacks can be increased to 98.7%. Furtherm...

Full description

Saved in:
Bibliographic Details
Published inPhysica scripta Vol. T157; no. 1; pp. 14034 - 14037
Main Authors Huang, Y S, Chang, C C, Lee, J W, Lee, Y C, Huang, C C, Wun, Z K, Tiong, K K
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.11.2013
Online AccessGet full text
ISSN0031-8949
1402-4896
DOI10.1088/0031-8949/2013/T157/014034

Cover

More Information
Summary:We present the distributed Bragg reflectors (DBRs) with 10- and 15-period zinc oxide (ZnO)/MgO multilayer films deposited on silicon by sputtering technology. The reflectivity for the 10-period ZnO/MgO stacks can reach to 91.4% and for the 15-period ZnO/MgO stacks can be increased to 98.7%. Furthermore, the transfer matrix method takes account of the Sellmeier equation and the random thickness model, plus it can well describe the measured reflectivity spectra. The investigation indicates that a refined control of the individual layer thickness and the number of layer periods are significant subjects to improve the DBRs performance.
ISSN:0031-8949
1402-4896
DOI:10.1088/0031-8949/2013/T157/014034