Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation

• Published in: International journal of computer integrated manufacturing Vol. 34; no. 7-8; pp. 734 - 751
• Main Authors: Yang, Fajun, Wu, Naiqi, Qiao, Yan, Su, Rong, Zhang, Chunjiang
• Format: Journal Article
• Language: English
• Published: Taylor & Francis 03.08.2021
• Subjects: multi-cluster tools; real-time scheduling; Semiconductor manufacturing systems; wafer residency time constraint

In semiconductor manufacturing systems, a time-constrained multi-cluster tool should be scheduled such that a wafer stays in a process chamber in a given time range to satisfy a wafer residency time constraint. In practice, activity time is subject to variation. It could lead to some fluctuation of...