An Analytical Model for the Threshold Voltage of Short-Channel Double-Material-Gate (DMG) MOSFETs with a Strained-Silicon (s-Si) Channel on Silicon-Germanium (SiGe) Substrates
In this paper, an analytical thresholdvoltage model is developed for a short-channeldouble-material-gate (DMG) strained-silicon ( s −Si )on silicon-germanium ( 1 X X Si − Ge ) MOSFET structure. The proposed threshold voltage model is based on theso called virtual-cathode potential formulation. Thevi...
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Published in | Journal of semiconductor technology and science Vol. 13; no. 4; pp. 367 - 380 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
대한전자공학회
01.08.2013
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, an analytical thresholdvoltage model is developed for a short-channeldouble-material-gate (DMG) strained-silicon ( s −Si )on silicon-germanium ( 1 X X Si − Ge ) MOSFET structure.
The proposed threshold voltage model is based on theso called virtual-cathode potential formulation. Thevirtual-cathode potential is taken as minimumchannel potential along the transverse direction of thechannel and is derived from two-dimensional (2D)potential distribution of channel region. The 2Dchannel potential is formulated by solving the 2DPoisson’s equation with suitable boundary conditionsin both the strained-Si layer and relaxed 1 X X Si − Gelayer. The effects of a number of device parameterslike the Ge mole fraction, Si film thickness and gatelengthratio have been considered on thresholdvoltage. Further, the drain induced barrier lowering(DIBL) has also been analyzed for gate-length ratioand amount of strain variations. The validity of thepresent 2D analytical model is verified with ATLASTM,a 2D device simulator from Silvaco Inc. KCI Citation Count: 1 |
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Bibliography: | G704-002163.2013.13.4.003 |
ISSN: | 1598-1657 2233-4866 |
DOI: | 10.5573/JSTS.2013.13.4.367 |