Microcavity array IR photodetector

An original microcavity array IR photodetector is proposed and the sensitivity and response time of its pixels are calculated. A photosensitive element represents a composite silicon microcavity made of two optically coupled closed waveguides on a dielectric substrate whose resonance wave depends on...

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Bibliographic Details
Published inQuantum electronics (Woodbury, N.Y.) Vol. 39; no. 12; pp. 1165 - 1168
Main Authors Esman, A K, Kuleshov, V K, Zykov, G L
Format Journal Article
LanguageEnglish
Published United States IOP Publishing 31.12.2009
Subjects
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DIELECTRIC MATERIALS
ELECTROMAGNETIC RADIATION
ELEMENTS
INFRARED RADIATION
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
MATERIALS
MICROSTRUCTURE
PHOTODETECTORS
RADIATIONS
RESOLUTION
RESONANCE
SEMIMETALS
SENSITIVITY
SILICON
SPATIAL RESOLUTION
SUBSTRATES
WAVEGUIDES
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Summary:An original microcavity array IR photodetector is proposed and the sensitivity and response time of its pixels are calculated. A photosensitive element represents a composite silicon microcavity made of two optically coupled closed waveguides on a dielectric substrate whose resonance wave depends on its temperature. This dependence is used to detect IR radiation which heats an absorbing element and the composite microcavity thermally coupled with this element. It is shown that for a spatial resolution of 45 {mu}m, the time response is 30 ms and the sensitivity is 10{sup -3} K at the IR radiation power of {approx} 4.7 x 10{sup -8} W element{sup -1}. (photodetectors)
ISSN:1063-7818
1468-4799
DOI:10.1070/QE2009v039n12ABEH014148