100-kHz diffraction-limited femtosecond laser micromachining

• Published in: Applied physics. B, Lasers and optics Vol. 80; no. 1; pp. 27 - 30
• Main Authors: SANNER, N, HUOT, N, AUDOUARD, E, LARAT, C, LAPORTE, P, HUIGNARD, J. P
• Format: Journal Article
• Language: English
• Published: Berlin Springer 2005
• Subjects: Beam characteristics: profile, intensity, and power; spatial pattern formation; Beams (radiation); Biological and medical applications; Diffraction; Distortion; Exact sciences and technology; Femtosecond; Fundamental areas of phenomenology (including applications); High speed; Industrial applications; Laser optical systems: design and operation; Lasers; Micromachining; Modulators; Optics; Physics; Scanning electron microscopy; Light matter interaction; Dielectric materials; Metals; Micromachining; Experimental device; Laser beam applications; Experimental study; Pulsed lasers; Stainless steels; Wave front; Ultrashort pulse; Optical modulators; fs range; Liquid crystal devices; Laser beam machining
• ISSN: 0946-2171; 1432-0649
• DOI: 10.1007/s00340-004-1697-x

We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to {/content/BGCK7GJ697YXL737/xxlarge955.gif}/15 peak--valley and {/content/BGCK7GJ697YXL737/xxlarge955.gif}/100 rms. Clean 1.7-{/content/BGCK7GJ697YXL737/xxlarge956.gif}m diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining.