Measurements of a semiconductor waveguide using a low-coherence interferometric reflectometer

A low-coherence interferometric reflectometer is studied as a tool to measure both semiconductor waveguide loss and reflectivity. Accurate estimation is given by using the integral values of the interference envelopes observed as reflected power from the sample. This estimation is free of influence...

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Bibliographic Details
Published inIEEE photonics technology letters Vol. 8; no. 2; pp. 251 - 253
Main Authors Kasaya, K., Yoshikuni, Y., Ishii, H.
Format Journal Article
LanguageEnglish
Published IEEE 01.02.1996
Subjects
Face detection
Interference
Light sources
Loss measurement
Optical coupling
Optical waveguides
Reflectivity
Semiconductor materials
Semiconductor waveguides
Wavelength measurement
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Summary:A low-coherence interferometric reflectometer is studied as a tool to measure both semiconductor waveguide loss and reflectivity. Accurate estimation is given by using the integral values of the interference envelopes observed as reflected power from the sample. This estimation is free of influence from coupling between the sample and reflectometer or dispersion in the semiconductor materials. The experimental results are in good agreement with those obtained by the Fabry-Perot method. The facet reflectivity measured in 0.5-mm-long very short samples shows waveguide thickness dependence agrees with theoretical results. This approach shows good repeatability and accuracy for short samples.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1041-1135
1941-0174
DOI:10.1109/68.484257