Development of Organic Thin-film Transistors on a Biocompatible Parylene-C Substrate

Organic thin-film transistors (OTFTs) fabricated on a biocompatible Parylene-C substrate can be applied to biosensors using a simple and cost-effective process. In this study, we developed biocompatible OTFTs by using organic materials to fabricate the substrate, gate dielectric, channel, and passiv...

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Bibliographic Details
Published inJournal of semiconductor technology and science Vol. 23; no. 1; pp. 1 - 7
Main Authors Kim, KyungMin, Kim, Sookyeong, Hong, Ah-Hyun, Ko, Yoojeong, Jang, Hyowon, Kim, Hyeok, Park, Dong-Wook
Format Journal Article
LanguageEnglish
Published 대한전자공학회 01.02.2023
Subjects
전기공학
cyclic olefin polymer
Parylene-C
biocompatible
P3HT
organic thin-film transistor
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Summary:Organic thin-film transistors (OTFTs) fabricated on a biocompatible Parylene-C substrate can be applied to biosensors using a simple and cost-effective process. In this study, we developed biocompatible OTFTs by using organic materials to fabricate the substrate, gate dielectric, channel, and passivation layer. Poly(3-hexylthiophene) (P3HT) was used to fabricate the OTFTs on a Parylene-C-based platform. As the gate dielectric, Parylene-C showed promising insulation properties. Finally, we generated a cyclic olefin polymer (COP) passivation layer to protect P3HT from oxygen and moisture, and the effect of the COP passivation layer on the P3HT channel was analyzed. The proposed materials and fabrication methods will be useful for various bio-applications of OTFTs. KCI Citation Count: 0
ISSN:1598-1657
2233-4866
DOI:10.5573/JSTS.2023.23.1.1