Capacitive sensor of absolute coordinate
A capacitive sensor of absolute coordinate with 100 mm range, 10 μm accuracy and 1 μm resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology.
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| Published in | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 405; no. 2; pp. 279 - 281 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
11.03.1998
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| Online Access | Get full text |
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| Summary: | A capacitive sensor of absolute coordinate with 100 mm range, 10 μm accuracy and 1 μm resolution has been developed. The measuring structure is manufactured using standard Printed Circuit Board Technology. |
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| ISSN: | 0168-9002 1872-9576 |
| DOI: | 10.1016/S0168-9002(96)01052-2 |