Microhardness and adhesion measurements of reactively sputtered TiN/AlN multilayer coatings deposited as function of mass-flow of nitrogen

Multilayer coatings of (Ti, Al)N x have been deposited by reactive sputtering from Ti and Al targets in a side-by-side configuration on WC and stainless steel substrates. The rotation of the substrate holder varied from 2 to 14 r.p.m. corresponding to a bilayer thickness of 0.8–8 nm. The acoustic em...

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Bibliographic Details
Published inSurface & coatings technology Vol. 100; pp. 333 - 337
Main Authors Manika, I., Muktepavela, F., Jensen, H., Sobota, J., Sorensen, G.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.03.1998
Subjects
Adhesion
Microhardness
TiN/AlN multilayers
Adhesion
Microhardness
TiN/AlN multilayers
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Summary:Multilayer coatings of (Ti, Al)N x have been deposited by reactive sputtering from Ti and Al targets in a side-by-side configuration on WC and stainless steel substrates. The rotation of the substrate holder varied from 2 to 14 r.p.m. corresponding to a bilayer thickness of 0.8–8 nm. The acoustic emission scratch technique for adhesion measurements was used for studying coating performance, and critical load values for the coatings on WC substrate up to 150 N were obtained. The Vickers microhardness in the load range 0.003–2 N was measured, and in order to obtain true hardness values, an optimal range of indentation depth and coating thickness was determined. Depending on the nitrogen flow rate and bilayer thickness, hardness values of 18–23 GPa were obtained at the film surface.
ISSN:0257-8972
1879-3347
DOI:10.1016/S0257-8972(97)00644-0