An accelerometer made in a two-layer surface-micromachining technology
A microaccelerometer has been fabricated in surface-micromachining technology and is designed to work in the 50 g range. An important advantage of this type of sensor is that only two polysilicon layers are needed. Nevertheless, the sensor works as a differential capacitor and can also be driven in...
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Published in | Sensors and actuators. A. Physical. Vol. 54; no. 1; pp. 651 - 655 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.06.1996
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Subjects | |
Online Access | Get full text |
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Summary: | A microaccelerometer has been fabricated in surface-micromachining technology and is designed to work in the 50
g range. An important advantage of this type of sensor is that only two polysilicon layers are needed. Nevertheless, the sensor works as a differential capacitor and can also be driven in a force-balanced mode. Compared to laterally driven structures, the technological steps are less critical. The typical bandwidth of the structure is approximately 3 kHz. The overall change in capacitance is 13 fF. In order to calculate the critical damping and to reduce deformation of the mass, simulations have been carried out. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/S0924-4247(97)80032-5 |