Complexes of point defects and impurities in electron-irradiated CZ-Si doped with hydrogen
We studied complexes generated by electron-irradiation of CZ-Si crystals pre-doped with hydrogen (H) from the measurements of optical absorption spectra. Specimens were prepared from a non-doped CZ-Si crystal. They were doped with H by heating at 1300°C in H 2 gas. They were then irradiated with 3-M...
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Published in | Physica. B, Condensed matter Vol. 308; pp. 216 - 219 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.12.2001
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Subjects | |
Online Access | Get full text |
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Summary: | We studied complexes generated by electron-irradiation of CZ-Si crystals pre-doped with hydrogen (H) from the measurements of optical absorption spectra. Specimens were prepared from a non-doped CZ-Si crystal. They were doped with H by heating at 1300°C in H
2 gas. They were then irradiated with 3-MeV electrons at room temperature. We measured their optical absorption spectra by an FT-IR spectrometer at about 7
K. An 836-cm
−1 peak which is due to a V–O pair was very strong. Optical absorption peaks due to complexes of H and self-interstitial (I) such as IH
2 (1987-cm
−1 peak), I
2H
2 (1870-cm
−1 peak) and I
3H
2 (1959-cm
−1 peak) were stronger than those of FZ-Si. Due to isochronal annealing, the intensity of V–O pair decreases at above 100°C. Simutaneously with this decrease, two new peaks appeared at about 2126 and 2151
cm
−1. This is due to a formation of VOH
2 complex by a reaction between a V–O pair and a H
2. |
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ISSN: | 0921-4526 1873-2135 |
DOI: | 10.1016/S0921-4526(01)00727-X |