Design, manufacturing and testing of gratings for synchrotron radiation

The grating is one of the most important components of a monochromator. Figure accuracy and microroughness of the substrate, accuracy of the groove pattern, shape and uniformity of the groove profiles, and the reflection coating are to be brought to the technological limits, if optimum performance i...

Full description

Saved in:
Bibliographic Details
Published inNuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 467; pp. 260 - 266
Main Authors Nelles, B, Heidemann, K.F, Kleemann, B
Format Journal Article
LanguageEnglish
Published Elsevier B.V 21.07.2001
Subjects
Blazed gratings
Grating manufacturing
VLD-gratings
07.85
VLD-gratings
Grating manufacturing
Blazed gratings
Online AccessGet full text

Cover

More Information
Summary:The grating is one of the most important components of a monochromator. Figure accuracy and microroughness of the substrate, accuracy of the groove pattern, shape and uniformity of the groove profiles, and the reflection coating are to be brought to the technological limits, if optimum performance is requested. Precise testing is as important as accurate manufacturing. Some new aspects for these topics are presented.
ISSN:0168-9002
1872-9576
DOI:10.1016/S0168-9002(01)00294-7