Absolute coverage measurement of a NaCl layer on InP(001) using SPIX

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 122; no. 1; pp. 93 - 98
• Main Authors: Xia, H., Lennard, W.N., Rodríguez-Fernández, L., Massoumi, G.R.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 1997
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/S0168-583X(96)00709-4

The absolute coverage of chlorine on an InP(001) substrate has been determined by a measurement of the Cl K X-ray yield produced by 1.8 MeV 4He + ions incident on an evaporated NaCl thin film of thickness 6.3 nm. A novel experimental geometry has been employed wherein the emitted X-rays are detected at grazing exit angles with respect to the target surface. In this configuration, the intensities of all substrate X-rays (P K, In L and bremsstrahlung) are reduced by a factor of ∼ 60 when the exciting beam is axially channeled along the 〈011〉 crystallographic direction.