Computer modeling and electron microscopy of silicon surfaces irradiated by cluster ion impacts

A hybrid molecular dynamics model has been applied for modeling impacts of Ar and decaborane clusters, with energies ranging from 25 to 1500 eV/atom, impacting Si surfaces. Crater formation, sputtering, and the shapes of craters and rims were studied. Our simulation predicts that on a Si(1 0 0), cra...

Full description

Saved in:
Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 202; pp. 261 - 268
Main Authors Insepov, Z., Allen, L.P., Santeufemio, C., Jones, K.S., Yamada, I.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.04.2003
Subjects
Online AccessGet full text

Cover

Loading…