Rheed in-plane rocking curve analysis of biaxially-textured polycrystalline MgO films on amorphous substrates grown by ion beam-assisted deposition

• Published in: Applied surface science Vol. 175-176; pp. 691 - 696
• Main Authors: Brewer, R.T, Hartman, J.W, Groves, J.R, Arendt, P.N, Yashar, P.C, Atwater, H.A
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.05.2001
• Subjects: In-plane rocking curve; Ion beam-assisted deposition; MgO; RHEED; Texture; Ion beam-assisted deposition; RHEED; MgO; In-plane rocking curve; Texture
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/S0169-4332(01)00106-4

We have developed a method for biaxial texture determination in polycrystalline films using reflection high energy electron diffraction (RHEED) in-plane rocking curves. Experimental RHEED in-plane rocking curves were taken at 25keV and 2.7° incidence angle from 11nm thick, nominally [100]-textured MgO films grown on amorphous Si3N4 by ion beam-assisted deposition (IBAD). The experimental RHEED in-plane rocking curves were analyzed by comparing them with RHEED in-plane rocking curves calculated using a kinematical simulation. The model enables a quantitative correlation between biaxial texture and RHEED in-plane rocking curve measurements. RHEED results are compared to X-ray rocking curve film analysis.