Reliability of MEMS - a methodical approach

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Bibliographic Details
Published inMicroelectronics and reliability Vol. 42; no. 9; pp. 1771 - 1776
Main Authors Müller-Fiedler, R., Wagner, U., Bernhard, W.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.09.2002
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ISSN:0026-2714
1872-941X
DOI:10.1016/S0026-2714(02)00229-9