Surface sensitive particle-induced X-ray emission

A technique for quantitative and non-destructive surface spectroscopy using charged particle X-ray production at grazing exit angles is described. The enhanced surface sensitivity derives from: (i) the effect of refraction which increases the probability for emission near the critical angle, and (ii...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 189; no. 1; pp. 49 - 55
Main Authors Lennard, W.N, Kim, J.K, Rodrı́guez-Fernández, L
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.04.2002
Subjects
Depth profiling
Grazing exit
Particle-induced X-ray emission
Surface spectroscopy
Surface spectroscopy
82.80.Ej
Particle-induced X-ray emission
81.70.-q
Grazing exit
68.55.Jk
61.18.-j
Depth profiling
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Summary:A technique for quantitative and non-destructive surface spectroscopy using charged particle X-ray production at grazing exit angles is described. The enhanced surface sensitivity derives from: (i) the effect of refraction which increases the probability for emission near the critical angle, and (ii) self-absorption for those photons emitted at depth and almost parallel to the sample surface, including bremsstrahlung radiation. For near- and on-surface impurities, quantification and depth profiling can be achieved in favourable cases by combining measured yields with the results of theoretical calculations.
ISSN:0168-583X
1872-9584
DOI:10.1016/S0168-583X(01)00993-4