Comparison of the pH sensitivity of different surfaces on tantalum pentoxide

In this study, we have observed the roughness of the surfaces of amorphous tantalum pentoxide (a-Ta 2O 5) using Atomic Force Microscopy. The electrolyte-oxide-semiconductor (EOS) structure of a-Ta 2O 5/SiO 2/p-Si/Al which was immersed in the different buffer solutions (pH=1–pH=13) measured the capac...

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Bibliographic Details
Published inSensors and actuators. B, Chemical Vol. 65; no. 1; pp. 237 - 238
Main Authors Chou, J.C, Hsiao, C.N
Format Journal Article
LanguageEnglish
Published Elsevier B.V 30.06.2000
Subjects
Amorphous-Ta 2O 5
EOS
pH-sensitivity
Roughness of the surface
EOS
pH-sensitivity
Amorphous-Ta 2O 5
Roughness of the surface
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Summary:In this study, we have observed the roughness of the surfaces of amorphous tantalum pentoxide (a-Ta 2O 5) using Atomic Force Microscopy. The electrolyte-oxide-semiconductor (EOS) structure of a-Ta 2O 5/SiO 2/p-Si/Al which was immersed in the different buffer solutions (pH=1–pH=13) measured the capacitance and calculated the pH-sensitivity of a-Ta 2O 5 of the different reacting pressures. Furthermore, the relationship between the roughness of the surface and the pH-sensitivity of a-Ta 2O 5 is presented in this paper.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0925-4005(99)00446-3