Pure and Sn-doped ZnO films produced by pulsed laser deposition

A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced wit...

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Bibliographic Details
Published inApplied surface science Vol. 197; pp. 467 - 471
Main Authors Holmelund, E, Schou, J, Tougaard, S, Larsen, N.B
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2002
Subjects
Pulsed laser deposition
Transparent conductors
ZnO
Pulsed laser deposition
ZnO
Transparent conductors
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Summary:A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced with Sn concentrations up to 16%. The specific resistivity is found to increase and the transmission of visible light to decrease with increasing Sn concentration.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(02)00367-7