A new industrial ion implanter for surface modification of metals

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 127; pp. 940 - 944
• Main Authors: Torp, B., Abrahamsen, P., Blomqvist, K.I., Eriksen, S., Høeg, P.L., Nielsen, B.R., Mikkelsen, N.J., Pedersen, J., Stræde, C.A., Døssing, M.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.1997
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/S0168-583X(97)00035-9

A new industrial ion implanter for surface modification of metals has been developed and built. Besides having all the features necessary for well controlled and efficient ion beam processing, such as high ion current capacity, ion mass analysis, large area beam scanning and sample manipulation, the new implanter is designed for industrial processing in production environment. With a new ion optics concept and layout the implanter is compact and only takes up 1 3 of the floor space required for traditional machines with similar performance. The implanter is fully computerised with automatic operation routines, data logging, remote operation and dial-up troubleshooting. The control software for the beam scanning and sample manipulation has been further improved in order to minimise setup time and to allow extensive use of the selected area implantation technique. This paper will describe the industrial implanter and the results of initial tests together with some industrial tribological and corrosion applications, which the implanter is aimed at.